𝔖 Bobbio Scriptorium

✦ LIBER ✦

A comparison of tungsten film deposition techniques for very large scale integration technology: K Y Ahn, Thin Solid Films, 153, 1987, 469–478

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 314 KB
Volume: 39
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(89)90321-7

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

A measurement of the distribution of arg

A measurement of the distribution of argon in sputter-deposited very large scale integration metallization: R L Hance et al, Thin Solid Films, 153, 1987, 401–408

📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 157 KB