A measurement of the distribution of argon in sputter-deposited very large scale integration metallization: R L Hance et al, Thin Solid Films, 153, 1987, 401–408

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 157 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90317-5