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A comparison of thermally and photochemically cross-linked polymers for nanoimprinting

✍ Scribed by K. Pfeiffer; F. Reuther; M. Fink; G. Gruetzner; P. Carlberg; I. Maximov; L. Montelius; J. Seekamp; S. Zankovych; C.M. Sotomayor-Torres; H. Schulz; H.-C. Scheer

Book ID: 114155522
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 410 KB
Volume: 67-68
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(03)00079-0

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