A comparison of the E-beam sensitivities and relative O2-plasma stabilities of organosilicon polymers.Part III. Lithographic characteristics of poly-1,1,3-trimethyl-1-sila - and poly-1,1,3,3-tetramethyl-1,3- disilacyclobutenes and related silmethylene polymers

✍ Scribed by E. Babich; J. Paraszczak; M. Hatzakis; S. Rishton; B. Grenon; H. Linde

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 487 KB
• Volume: 9
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(89)90115-9