A reliability comparison of RTO and furn
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L Fonseca; F Campabadal; B Garrido; J Samitier
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Article
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1998
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Elsevier Science
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English
โ 341 KB
Three thermal oxidation methods aimed at growing thin SiO films have been considered: Low temperature oxidation, 2 O -diluted oxidation, and Rapid Thermal Oxidation (RTO). These procedures differ not only in their oxidation temperature 2 but also in the thermal uniformity that is possible to achieve