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A comparison of pores in silicon and pores in III–V compound materials

✍ Scribed by Christophersen, M. ;Langa, S. ;Carstensen, J. ;Tiginyanu, I. M. ;Föll, H.

Book ID
105362333
Publisher
John Wiley and Sons
Year
2003
Tongue
English
Weight
327 KB
Volume
197
Category
Article
ISSN
0031-8965

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## Abstract Role of linear nucleation centres (surface grooves) in formation of macro‐pores has been studied for n‐type Si. It has been found that linear nucleation centres, contrary to the case of point nucleation pits, initiate formation of semi‐regular pore pattern: along the grooves the pores a