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A comparison of mechanical lapping versus chemical-assisted mechanical polishing and planarization of chemical vapor deposited (CVD) diamond

✍ Scribed by Ollison, C.D.; Brown, W.D.; Malshe, A.P.; Naseem, H.A.; Ang, S.S.


Book ID
121960910
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
941 KB
Volume
8
Category
Article
ISSN
0925-9635

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