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A Comparison for the Effects of Various Forms of Silicon Contamination on Contact Performance

✍ Scribed by Witter, G.; Leiper, R.

Book ID
117911218
Publisher
IEEE
Year
1979
Tongue
English
Weight
928 KB
Volume
2
Category
Article
ISSN
0148-6411

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## Abstract We demonstrate the influence of the contact resistance on the electrical properties of a‐IGZO thin‐film transistors (TFTs) with ZrO~2~ gate insulator grown by rf‐magnetron sputtering at room temperature by adopting various channel widths and lengths. These TFTs have all been processed a