A comparison between microwave reflectance, thermal wave modulated reflectance and defect etching for detecting transition metals in silicon : D. R. Sparks and A. J. Levitan. Microelectronics Journal23, 283 (1992)

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 115 KB
• Volume: 33
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(93)90223-l