A comparison between microwave reflectance, thermal wave modulated reflectance and defect etching for detecting transition metals in silicon

✍ Scribed by D.R. Sparks; A.J. Levitan

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 472 KB
• Volume: 23
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/0026-2692(92)90025-v