A Comparative Study of Single and Double Langmuir Probe Techniques for RF Plasma Characterization

✍ Scribed by R. M. Castro; G. A. Cirino; P. Verdonck; H. S. Maciel; M. Massi; M. B. Pisani; R. D. Mansano

• Publisher: John Wiley and Sons
• Year: 1999
• Tongue: English
• Weight: 615 KB
• Volume: 39
• Category: Article
• ISSN: 0005-8025
• DOI: 10.1002/ctpp.2150390305