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A comparative study of different IBA techniques for determining the thickness of thin SiO2 films

✍ Scribed by N Dytlewski; D.D Cohen; P.J Evans; K.E Prince; G.A Collins; C Barbe; D.J Cassidy


Book ID
114171967
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
101 KB
Volume
161-163
Category
Article
ISSN
0168-583X

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