A comparative study of CrAlN films synthesized by dc and pulsed dc reactive magnetron facing target sputtering system with different pulse frequencies

✍ Scribed by S. Khamseh; M. Nose; T. Kawabata; T. Nagae; K. Matsuda; S. Ikeno

• Book ID: 116607410
• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 444 KB
• Volume: 508
• Category: Article
• ISSN: 0925-8388
• DOI: 10.1016/j.jallcom.2010.08.042