✦ LIBER ✦

A comparative study of CH4and CF4rf discharges using a consistent plasma physics and chemistry simulator

✍ Scribed by Nikolaos V. Mantzaris; Evangelos Gogolides; Andreas G. Boudouvis

Book ID: 105201583
Publisher: Springer
Year: 1996
Tongue: English
Weight: 1016 KB
Volume: 16
Category: Article
ISSN: 0272-4324
DOI: 10.1007/bf01447148

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