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A compact system for simultaneous measurement of linear and angular displacements of nano-stages

✍ Scribed by Kim, Jae-Wan; Kang, Chu-Shik; Kim, Jong-Ahn; Eom, Taebong; Cho, Mijung; Kong, Hong Jin


Book ID
115408372
Publisher
Optical Society of America
Year
2007
Tongue
English
Weight
294 KB
Volume
15
Category
Article
ISSN
1094-4087

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