A compact ESPI system for displacement measurements of specular reflecting or optical rough surfaces

✍ Scribed by René Skov Hansen

• Book ID: 108401964
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 399 KB
• Volume: 41
• Category: Article
• ISSN: 0143-8166
• DOI: 10.1016/s0143-8166(02)00135-5