✦ LIBER ✦

A case study on process monitoring for surface features

✍ Scribed by Winson Taam

Publisher: John Wiley and Sons
Year: 1998
Tongue: English
Weight: 218 KB
Volume: 14
Category: Article
ISSN: 0748-8017
DOI: 10.1002/(sici)1099-1638(199807/08)14:4<219::aid-qre193>3.0.co;2-5

No coin nor oath required. For personal study only.

✦ Synopsis

In the fabrication of integrated circuits it is a common practice to measure the oxide thickness at many locations on a wafer and to summarize these measurements in terms of the average thickness and thickness uniformity. These summary measures, however, may not be as informative as certain features of the thickness surface in terms of the process objectives. Alternative surface features are considered and process monitoring techniques are illustrated using a sample of wafers. ©1998 John Wiley & Sons, Ltd.

📜 SIMILAR VOLUMES

A case study on reengineering manufactur

A case study on reengineering manufacturing processes and structures

✍ George Valiris; Michalis Glykas 📂 Article 📅 2000 🏛 John Wiley and Sons 🌐 English ⚖ 258 KB 👁 2 views

Process thinking has expanded in recent years mainly due to the need for improved quality of operations. As a result, there is a growing need for business modelling and analysis techniques that provide justification for understanding and analysis of the organizational environment with the aim of dev

Non-Homogeneous Gibbs Process Models for

Non-Homogeneous Gibbs Process Models for Forestry — A Case Study

✍ Dietrich Stoyan; Helga Stoyan 📂 Article 📅 1998 🏛 John Wiley and Sons 🌐 English ⚖ 214 KB 👁 1 views

A case for case studies on HRD ethics an

A case for case studies on HRD ethics and integrity

✍ Darlene F. Russ-Eft 📂 Article 📅 2000 🏛 John Wiley and Sons 🌐 English ⚖ 37 KB 👁 1 views

Effects of physical properties estimatio

Effects of physical properties estimation on process design: a case study using AspenPlus

✍ Loic Cadoret; Cheng-Ching Yu; Hsiao-Ping Huang; Ming-Jer Lee 📂 Article 📅 2009 🏛 Wiley (John Wiley & Sons) 🌐 English ⚖ 213 KB 👁 1 views

## Abstract This study focuses on the physical property model parameters estimation in order to accurately simulate separation processes for a given set of components. The non‐random two‐liquid (NRTL) model was chosen and parameters were calculated using different methods: experimental data regress

Regular and inverted batch process struc

Regular and inverted batch process structures for pressure swing distillation: a case study

✍ Andreas Klein; Jens-Uwe Repke 📂 Article 📅 2009 🏛 Wiley (John Wiley & Sons) 🌐 English ⚖ 286 KB

A New Evanescent Wave Spectroscopy Techn

A New Evanescent Wave Spectroscopy Technique for Studying Adsorption/Desorption Processes at Surfaces

✍ Bordo, V. G. ;Rubahn, H.-G. 📂 Article 📅 1999 🏛 John Wiley and Sons 🌐 English ⚖ 137 KB 👁 1 views

We present a new spectroscopic technique which utilizes evanescent waves at a gas/glass prism interface for studying adsorption/desorption processes. We have measured the Autler-Townes splitting in the two-evanescent wave fluorescence spectrum of Na atoms in the gas phase as a function of the temper