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A calculation of diffusion parameters for Cu/Ta and Ta/Si interfaces in Cu/Ta/Si(1 1 1) structure

✍ Scribed by A.Z. Moshfegh; O. Akhavan

No coin nor oath required. For personal study only.

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A calculation of diffusion parameters for Cu/Ta and Ta/Si interfaces in Cu/Ta/Si(1&#xa0;1&#xa0;1) structure