A 0.2-μm 180-GHz-fmax 6.7-ps-ECL SOI/HRS self-aligned SEG SiGe HBT/CMOS technology for microwave and high-speed digital applications

✍ Scribed by Washio, K.; Ohue, E.; Shimamoto, H.; Oda, K.; Hayami, R.; Kiyota, Y.; Tanabe, M.; Kondo, M.; Hashimoto, T.; Harada, T.

• Book ID: 114538995
• Publisher: IEEE
• Year: 2002
• Tongue: English
• Weight: 187 KB
• Volume: 49
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/16.981217