92. Cathode sputtering of tantalum and tungsten at various temperatures: V S Shustrov and A Kh Ayukhanov, Radiotekh i Elektron, 10 (3), 1965, 541–547, (in Russian)

• Publisher: Elsevier Science
• Year: 1966
• Tongue: English
• Weight: 142 KB
• Volume: 16
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(66)92611-x