676. Cathodic sputtering of tantalum and tungsten at various temperatures: V A Shustrov,Radio Eng & Electronics, 10 (3), 1965, p 541 (in Russian)

• Publisher: Elsevier Science
• Year: 1965
• Tongue: English
• Weight: 146 KB
• Volume: 15
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(65)91164-4