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848. The technique of depositing thin metallic films very close to each other in a vacuum and application of the method to the manufacture of field-effect transistors: J. Delinas and M. Chappey, Le Vide, 18 (104), March/April 1963, 89–94


Publisher
Elsevier Science
Year
1963
Tongue
English
Weight
131 KB
Volume
13
Category
Article
ISSN
0042-207X

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