7653. Depth profiling of implanted 13C in diamond as a function of implantation temperature: R A Spits et al, Nucl Instrum Meth Phys Res, B51, 1990, 247–252

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 144 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)91721-y