✦ LIBER ✦
7261. A comparison between zero and seven degrees of tilt implantation of As+, P+ and BF+2: C Bresolin et al,Nucl Instrum Meth Phys Res, B51, 1990, 122–124
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 155 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0042-207X
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