7475. Optimizing optical properties of reactively sputtered titanium nitride films: A Skerlavaj et al,Thin Solid Films,186, 1990, 15–26

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 176 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)91543-w