𝔖 Bobbio Scriptorium

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7470. Mechanical properties of high deposition rate SiO2 films: C V Macchioni,J Vac Sci Technol, A8, 1990, 1340–1343

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 158 KB
Volume: 42
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(91)91538-y

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📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 144 KB