7188. High-rate sputter deposition of SiO2 and TiO2 films for optical applications: SS Nandra, J Vac Sci Technol, A8, 1990, 3179–3185

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 144 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)90995-u