7452. Heterogeneous Si3N4 growth during SiNx film deposition and thermal nitridation of Si(100): an X-ray photoemission spectroscopy study: J L Bischoff et al, Thin Soli Films, 187, 1990, 101–109

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 161 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)91520-x