Editorial: Silicon Carbide CVD for Elect
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P. Wellmann; M. Pons
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Article
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2006
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John Wiley and Sons
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English
β 83 KB
## Abstract Silicon carbide CVD for device applications is the topic of this Special Issue of __Chemical Vapor Deposition__. In this introduction, Guest Editors Michel Pons and Peter Wellman give an overview of the current technologies for SiC thinβfilm growth with adjacent contributions on layer c