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638. High-rate physical vapour deposition of hafnium foil—a feasibility study: R F Bunshah, and R T Webster, Proc Vac Metallurgy Conf, J Vac Sci Technol, 8 (6), Nov–Dec 1971, VM95–VM98


Publisher
Elsevier Science
Year
1972
Tongue
English
Weight
181 KB
Volume
22
Category
Article
ISSN
0042-207X

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