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635. Model for calculating the deposit temperature in high-rate physical-vapour-deposition: R Chow and R F Bunshah, Proc Vac Metallurgy Conf, J Vac Sci Technol.8 (6), Nov–Dec 1971, VM73–VM78

Publisher: Elsevier Science
Year: 1972
Tongue: English
Weight: 181 KB
Volume: 22
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(72)90167-4

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