𝔖 Bobbio Scriptorium

✦ LIBER ✦

6149. An experimental variable shaped electron beam lithography system: Fu-min He et al, J Vac Sci Technol, B3, 1985, 121–123

Book ID: 103462893
Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 187 KB
Volume: 36
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(86)90416-1

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