6196. A high-speed, high-precision electron beam lithography system (electron optics): N Saitou et al, J Vac Sci Technol, B3, 1985, 98–101

• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 192 KB
• Volume: 36
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(86)90463-x