583. High vacuum with sputter ion pumps: A.E. Barrington, Semicond. Prod. & Sol. Stat. Tech., 6(12), Dec. 1963, 29

• Publisher: Elsevier Science
• Year: 1964
• Tongue: English
• Weight: 117 KB
• Volume: 14
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(64)90367-7