478. High vacuum with sputter-ion pumps: A. E. Barrington, Semiconductor Prod. Solid-State Technol., 6 (12), Dec. 1963, 29–33

• Publisher: Elsevier Science
• Year: 1964
• Tongue: English
• Weight: 108 KB
• Volume: 14
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(64)90904-2