𝔖 Bobbio Scriptorium

✦ LIBER ✦

5236. Metal/silicon interface formation: The NiSi and PdSi systems: P J Grunthaner et al, J Vac Sci Technol, 19 (3), 1981, 649–656

Publisher: Elsevier Science
Year: 1982
Tongue: English
Weight: 143 KB
Volume: 32
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(82)94269-5

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5160. Oxygen impurity effects at metal/s

5160. Oxygen impurity effects at metal/silicide interfaces: Formation of silicon oxide and suboxides in the NiSi system: P J Grunthaner et al, J Vac Sci Technol, 19 (3), 1981, 641–648

📂 Article 📅 1982 🏛 Elsevier Science 🌐 English ⚖ 144 KB