4896108 Test circuit for measuring specific contact resistivity of self-aligned contacts in integrated circuits

✍ Scribed by WilliamT Lynch; KwokK Ng

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 88 KB
• Volume: 31
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(91)90478-p