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4.7 Dependence of some properties of Ni-Cr thin films on the parameters of the production processes

✍ Scribed by J Boros-Gyevi; G Motál


Publisher
Elsevier Science
Year
1967
Tongue
English
Weight
171 KB
Volume
17
Category
Article
ISSN
0042-207X

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In this study, we show that the optical constants of sputter-deposited chromium depend on the argon pressure used for the deposition. Higher argon pressure gives lower extinction coefficients. Sheet resistance measurements show that those materials with lower extinction coefficients also have lower