𝔖 Bobbio Scriptorium

✦ LIBER ✦

4043. High-current ion source for use on the PR-30 implanter. (USA): N Williams, J Vac Sci Technol, 15 (3), 1978, 1076–1079

Book ID: 104264951
Publisher: Elsevier Science
Year: 1979
Tongue: English
Weight: 286 KB
Volume: 29
Category: Article
ISSN: 0042-207X
DOI: 10.1016/s0042-207x(79)80695-8

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4044. Development of ERC cold-cathode ion source for use on the PR-30 ion-implantation system. (USA): H M B Bird and J P Flemming, J Vac Sci Technol, 15 (3), 1978, 1070–1075

📂 Article 📅 1979 🏛 Elsevier Science 🌐 English ⚖ 147 KB