✦ LIBER ✦
4044. Development of ERC cold-cathode ion source for use on the PR-30 ion-implantation system. (USA): H M B Bird and J P Flemming, J Vac Sci Technol, 15 (3), 1978, 1070–1075
- Publisher
- Elsevier Science
- Year
- 1979
- Tongue
- English
- Weight
- 147 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0042-207X
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