3D surface topography and reflectivity of anisotropic etched silicon micromirrors for BioMEMS

✍ Scribed by R. E. Mackay; N. Lionis; H. R. Le

• Book ID: 106186164
• Publisher: Springer-Verlag
• Year: 2011
• Tongue: English
• Weight: 612 KB
• Volume: 17
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-011-1362-3