✦ LIBER ✦
Generation of 3D random topography datasets with periodic boundaries for surface metrology algorithms and measurement standards
✍ Scribed by M. Uchidate; K. Yanagi; I. Yoshida; T. Shimizu; A. Iwabuchi
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 947 KB
- Volume
- 271
- Category
- Article
- ISSN
- 0043-1648
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