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3D modeling of thermal annealing of ion-implanted impurities

✍ Scribed by M. V. Kazitov; V. V. Nelaev; E. F. Nogotov

Book ID: 110622674
Publisher: Springer US
Year: 1998
Tongue: English
Weight: 428 KB
Volume: 71
Category: Article
ISSN: 1573-871X
DOI: 10.1007/bf02681459

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