✦ LIBER ✦

3904. Mass spectrometric study of plasma etching. (USA)

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Mass spectrometric study of plasma etchi

✍ Raby, Bruce A. 📂 Article 📅 1978 🏛 AVS (American Vacuum Society) ⚖ 557 KB

Mass spectrometric study of NF3plasma et

✍ Jerome Perrin; Jacques Méot; Jean-Marie Siéfert; Jacques Schmitt 📂 Article 📅 1990 🏛 Springer 🌐 English ⚖ 612 KB

Mass spectrometric and ion energy diagno

✍ Ferreiro, L. M. 📂 Article 📅 1987 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 672 KB

DC plasma etching of silicon by sulfur h

✍ John J. Wagner; Werner W. Brandt 📂 Article 📅 1981 🏛 Springer 🌐 English ⚖ 604 KB

Mass spectrometric study of SF6-N2plasma

✍ Nobuki Mutsukura; Guy Turban 📂 Article 📅 1990 🏛 Springer 🌐 English ⚖ 671 KB

Mass Spectrometric Study of Argon Afterg

✍ Bhattacharya, A. K. 📂 Article 📅 1970 🏛 American Institute of Physics 🌐 English ⚖ 480 KB