✦ LIBER ✦
DC plasma etching of silicon by sulfur hexafluoride. Mass spectrometric study of the discharge products
✍ Scribed by John J. Wagner; Werner W. Brandt
- Book ID
- 104812326
- Publisher
- Springer
- Year
- 1981
- Tongue
- English
- Weight
- 604 KB
- Volume
- 1
- Category
- Article
- ISSN
- 0272-4324
No coin nor oath required. For personal study only.