Silicon-on-insulator and SiGe waveguide
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M. El Kurdi; P. Boucaud; S. Sauvage; G. Fishman; O. Kermarrec; Y. Campidelli; D.
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Article
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2003
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Elsevier Science
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English
β 192 KB
We have investigated near infrared p-i-n waveguide photodetectors with Ge/Si self-assembled islands as optical active region. Two samples with Ge islands grown by high-pressure chemical vapor deposition were studied. The ΓΏrst sample consists of a p-i-n junction with islands embedded in a silicon-on-