Multidimensional geometric modeling for
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P. Regli; K. Lamboglia; G. GarretΓ³n; M. Neeracher; M. Westermann; N. Strecker; W
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Article
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1996
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Elsevier Science
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English
β 672 KB
This article gives an overview of our current state of the art in generating 3D geometry and doping representations for complex semiconductor devices. Focusing on the multidimensional aspects, we describe how -starting from the mask layout and the standard process representation (SPR)-the 3D device