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2D edge plasma modeling extended up to the main chamber

✍ Scribed by W. Dekeyser; M. Baelmans; D. Reiter; P. Börner; V. Kotov


Book ID
113731191
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
560 KB
Volume
415
Category
Article
ISSN
0022-3115

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