𝔖 Bobbio Scriptorium
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2496. An auger analysis of the SiO2-Si interface


Publisher
Elsevier Science
Year
1977
Tongue
English
Weight
147 KB
Volume
27
Category
Article
ISSN
0042-207X

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The peculiarities of Si/SiO2 interfaces
✍ T. Kryshtab; G. GΓ³mez Gasga; N. Korsunska; M. Baran; S. Kirillova; L. Khomenkova πŸ“‚ Article πŸ“… 2010 πŸ› Elsevier Science 🌐 English βš– 281 KB

Si-rich-SiO 2 layers with excess silicon of 45-50% were grown by RF magnetron co-sputtering from pure SiO 2 and Si targets and were studied by Raman scattering, HRTEM, electron-paramagnetic resonance and X-ray diffraction (XRD) methods as well as by photo-voltage technique operated at different temp