Multipurpose 14.5 GHz ECR ion sourc
Multipurpose 14.5 GHz ECR ion source: Special features and application for surface modification
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S. KΓΆkΓ©nyesi; I. IvΓ‘n; E. TakΓ‘cs; J. PΓ‘linkΓ‘s; S. Biri; A. Valek
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Article
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2005
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Elsevier Science
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English
β 170 KB